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The Microstructure and X-Ray Reflectivity of Mo/Si Multilayers
AuthID
P-00F-PYT
11
Author(s)
Andreev, SS
·
Gaponov, SV
·
Gusev, SA
·
Haidl, MN
·
Kluenkov, EB
·
Prokhorov, KA
·
Polushkin, NI
·
Sadova, EN
·
Salashchenko, NN
·
Suslov, LA
·
Zuev, SY
Document Type
Article
Year published
2002
Published
in
THIN SOLID FILMS,
ISSN: 0040-6090
Volume: 415, Issue: 1-2, Pages: 123-132 (10)
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Metadata
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Publication Identifiers
DOI
:
10.1016/s0040-6090(02)00536-9
Scopus
: 2-s2.0-0036672239
Wos
: WOS:000178198000019
Source Identifiers
ISSN
: 0040-6090
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