The Microstructure and X-Ray Reflectivity of Mo/Si Multilayers

AuthID
P-00F-PYT
11
Author(s)
Andreev, SS
·
Gaponov, SV
·
Gusev, SA
·
Haidl, MN
·
Kluenkov, EB
·
Prokhorov, KA
·
Sadova, EN
·
Salashchenko, NN
·
Suslov, LA
·
Zuev, SY
Document Type
Article
Year published
2002
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 415, Issue: 1-2, Pages: 123-132 (10)
Indexing
Publication Identifiers
Scopus: 2-s2.0-0036672239
Wos: WOS:000178198000019
Source Identifiers
ISSN: 0040-6090
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