31
TITLE: Sputtering preparation of silicon nitride thin films for gate dielectric applications
AUTHORS: Pereira, L ; Aguas, H ; Igreja, R ; Martins, RMS ; Nedev, N; Raniero, L; Fortunato, E ; Martins, R ;
PUBLISHED: 2004, SOURCE: 2nd International Materials Symposium in ADVANCED MATERIALS FORUM II, VOLUME: 455-456
INDEXED IN: Scopus WOS CrossRef
IN MY: ORCID
Page 4 of 4. Total results: 31.