Martin Andritschky


AuthID: R-000-D47

Publications Requiring Validation

21
TITLE: Origin of gas impurities in sputtering plasmas during thin film deposition  Full Text
AUTHORS: Andritschky, M;
PUBLISHED: 1991, SOURCE: Vacuum, VOLUME: 42, ISSUE: 12
INDEXED IN: CrossRef
IN MY: ORCID
Page 3 of 3. Total results: 21.

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