141
TITLE: Low Filament Temperature Deposition of a-Si:H by Catalytic Chemical Vapor Deposition
AUTHORS: Brogueira, P; Grebner, S; Wang, F; schwarz, R; Chu, V; J.P Conde;
PUBLISHED: 1993, SOURCE: MRS Proc. - MRS Proceedings, VOLUME: 297
INDEXED IN: CrossRef
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