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TITLE: Study of an argon magnetron discharge used for molybdenum sputtering. II: spectroscopic analysis and comparison with the model
AUTHORS: Guimaraes, F; Almeida, JB; Bretagne, J;
PUBLISHED: 1993, SOURCE: PLASMA SOURCES SCIENCE & TECHNOLOGY, VOLUME: 2, ISSUE: 3
INDEXED IN: Scopus WOS CrossRef: 26
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