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A Reaction Mechanism for Oxygen Plasmas
AuthID
P-00Y-XGJ
6
Author(s)
Dias, TC
·
Fromentin, C
·
Alves, LL
·
Tejero-del-Caz, A
·
Silva, T
·
Guerra, V
Document Type
Article
Year published
2023
Published
in
PLASMA SOURCES SCIENCE & TECHNOLOGY,
ISSN: 0963-0252
Volume: 32, Issue: 8, Pages: 084003 (22)
Indexing
Wos
®
Scopus
®
Crossref
®
7
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®
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Publication Identifiers
DOI
:
10.1088/1361-6595/aceaa4
Scopus
: 2-s2.0-85167866155
Wos
: WOS:001044526600001
Source Identifiers
ISSN
: 0963-0252
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