Properties of Ito Films Deposited by Plasma Enhanced Rte on Unheated Polymer Sheets - Dependence on Rf Electrode Distance from Substrates

AuthID
 P-000-9YS
4
Author(s)
Document Type
Article
Year published
2004
Published
in JOURNAL OF NON-CRYSTALLINE SOLIDS, ISSN: 0022-3093
Volume: 338, Issue: 1 SPEC. ISS., Pages: 630-633 (4)
Conference
20Th International Conference on Amorphous and Microcrystalline Semiconductors, Date: AUG 25-29, 2003, Location: Campos do Jordao, BRAZIL
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Scopus®
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Publication Identifiers
Scopus: 2-s2.0-2942594088
Wos: WOS:000222219000141
Source Identifiers
ISSN: 0022-3093
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