Properties of A-Si : H Tfts Using Silicon Carbonitride as Dielectric

AuthID
P-000-9YV
Document Type
Article
Year published
2004
Published
in JOURNAL OF NON-CRYSTALLINE SOLIDS, ISSN: 0022-3093
Volume: 338, Issue: 1 SPEC. ISS., Pages: 797-801 (5)
Conference
20Th International Conference on Amorphous and Microcrystalline Semiconductors, Date: AUG 25-29, 2003, Location: Campos do Jordao, BRAZIL
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-2942558747
Wos: WOS:000222219000179
Source Identifiers
ISSN: 0022-3093
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