Reactive Deposition of Al-N Coatings in Ar/N-2 Atmospheres Using Pulsed-Dc or High Power Impulse Magnetron Sputtering Discharges

AuthID
 P-003-3YF
6
Author(s)
Guillaumot, A
·
Lapostolle, F
·
Dublanche Tixier, C
·
Billard, A
·
Langlade, C
Document Type
Article
Year published
2010
Published
in VACUUM, ISSN: 0042-207X
Volume: 85, Issue: 2, Pages: 120-125 (6)
Indexing
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Scopus®
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Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-77956619470
Wos: WOS:000282548700002
Source Identifiers
ISSN: 0042-207X
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