Effect of Dehydrogenation on Optical Constants of Silicon Nitride Thin Films

AuthID
 P-00Z-8ET
4
Author(s)
Document Type
Article
Year published
2023
Published
in OPTICAL MATERIALS, ISSN: 0925-3467
Volume: 145, Pages: 114480 (6)
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Wos®
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Publication Identifiers
SCOPUS: 2-s2.0-85174194521
Wos: WOS:001148907500001
Source Identifiers
ISSN: 0925-3467
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