Modeling of the Intrinsic Stress Effect on the Resonant Frequency of Nems Resonators Integrated by Beams with Variable Cross-Section

AuthID
 P-00Z-GVN
5
Author(s)
Aguilera Cortés, LA
·
García Ramírez, PJ
·
Plascencia Mora, H
·
Torres Cisneros, M
Document Type
Article
Year published
2010
Published
in MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, ISSN: 0946-7076
Volume: 16, Issue: 12, Pages: 2067-2074 (8)
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Publication Identifiers
SCOPUS: 2-s2.0-78049468983
Wos: WOS:000283512300009
Source Identifiers
ISSN: 0946-7076
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