Mechanical Design of a Novel Mems Resonant Sensor for Monitoring In-Plane Magnetic Fields

AuthID
 P-00Z-GWQ
3
Author(s)
Alvarado Rosas, VO
·
Aguilera Cortés, LA
Document Type
Article
Year published
2017
Published
in MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, ISSN: 0946-7076
Volume: 23, Issue: 8, Pages: 3245-3255 (11)
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Publication Identifiers
SCOPUS: 2-s2.0-84992161848
Wos: WOS:000405924800022
Source Identifiers
ISSN: 0946-7076
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