Automated Instrument for the Deposition of Thin Films Using Successive Ionic Layer Adsorption and Reaction

AuthID
 P-00Z-H18
8
Author(s)
Woo-García R.M.
·
Rodríguez-Ibarra I.
·
Osorio-De-la-rosa E.
·
Guarneros-Aguilar C.
·
Caballero-Briones F.
·
Agustín-Serrano R.
·
López-Huerta F.
Document Type
Article
Year published
2022
Published
in Processes
Volume: 10, Issue: 3, Pages: 492
Indexing
Scopus®
Crossref®2
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-85126542498
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