Design and Modeling of a Mems Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications

AuthID
 P-00Z-H1F
5
Author(s)
Peña-García N.N.
·
Aguilera-Cortés L.A.
·
González-Palacios M.A.
·
Raskin J.P.
·
Document Type
Article
Year published
2018
Published
in Sensors (Switzerland), ISSN: 14248220
Volume: 18, Issue: 10, Pages: 3545
Indexing
Scopus®
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Pubmed®
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Publication Identifiers
Pubmed: 30347743
SCOPUS: 2-s2.0-85055187000
Source Identifiers
ISSN: 14248220
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