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Computer-Aided Simulation of a Rotary Sputtering Magnetron
AuthID
P-000-A51
3
Author(s)
Fan, QH
·
Gracio, JJ
·
Zhou, LQ
Document Type
Article
Year published
2004
Published
in
JOURNAL OF APPLIED PHYSICS,
ISSN: 0021-8979
Volume: 95, Issue: 11, Pages: 6017-6020 (4)
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Publication Identifiers
DOI
:
10.1063/1.1715133
Scopus
: 2-s2.0-2942661977
Wos
: WOS:000221657300009
Source Identifiers
ISSN
: 0021-8979
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