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Hardness, Adhesion, and Wear Behavior of Magnetron Cosputtered Ti:zr-O-N Thin Films
AuthID
P-00Z-XFW
7
Author(s)
Cristea, D
·
Scarlatescu, AI
·
Bulai, G
·
Martínez-Martínez, D
·
Oliveira, CIDS
·
Yan, G
·
Cunha, L
Document Type
Article
Year published
2024
Published
in
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
ISSN: 0734-2101
Volume: 42, Issue: 2
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Metadata
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Publication Identifiers
DOI
:
10.1116/6.0003267
SCOPUS
: 2-s2.0-85184023501
Wos
: WOS:001153944100002
Source Identifiers
ISSN
: 0734-2101
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