A Radially Resolved Experimental Investigation of the Electron Energy Distribution Function in a Microwave Discharge Sustained by Propagating Surface Waves

AuthID
 P-012-5SJ
2
Author(s)
Zamfirov D.
Document Type
Article
Year published
1995
Published
in Journal of Physics D: Applied Physics, ISSN: 00223727
Volume: 28, Issue: 7, Pages: 1354-1361 (7)
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Publication Identifiers
SCOPUS: 2-s2.0-5844307486
Source Identifiers
ISSN: 00223727
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