Axial Dependence of the Electron Energy Distribution Function in Microwave Discharges Sustained by Propagating Surface Waves

AuthID
 P-012-5SK
3
Author(s)
Grosse S.
·
Schlüter H.
·
Document Type
Article
Year published
1994
Published
in Physica Scripta, ISSN: 00318949
Volume: 50, Issue: 5, Pages: 532-539 (7)
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Scopus®
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Publication Identifiers
Scopus: 2-s2.0-0040370874
Source Identifiers
ISSN: 00318949
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