Large-Area Surface Wave Excited N/Sub 2/-Ar Overdense Plasma

AuthID
P-013-1ZA
4
Author(s)
Tatarova, E
·
Dias, F
·
Ferreira, C
Document Type
Proceedings Paper
Year published
2003
Published
in IEEE Conference Record - Abstracts. 2002 IEEE International Conference on Plasma Science (Cat. No.02CH37340)
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