Tuneable Properties of Zirconium Oxynitride Thin Films

AuthID
 P-013-3PF
6
Author(s)
Carvalho, P
·
Pessoa Barradas, N
·
Alves, E
·
Pedro Espinós, J
·
Vaz, F
Document Type
Book Chapter
Year published
2013
Published
in Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Pages: 64-112
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