Esr Line Share Study of Amorphous Centres in Ion Implanted Silicon

AuthID
P-013-JP2
4
Author(s)
Götz, G
·
Karthe, W
·
Schnabel, B
·
Document Type
Article
Year published
1978
Published
in Physica Status Solidi (a), ISSN: 0031-8965
Volume: 50, Issue: 2, Pages: K209-K212
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ISSN: 0031-8965
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