Fast Step-Response Settling of Micro Electrostatic Actuators Operated at Low Air Pressure Using Input Shaping

AuthID
 P-003-HWN
4
Author(s)
Mol, L
·
Document Type
Article
Year published
2009
Published
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 19, Issue: 7, Pages: 074020 (5)
Conference
19Th Micromechanics Europe Workshop, Date: SEP 28-30, 2008, Location: Aachen, GERMANY, Host: RWTH Aachen Univ
Indexing
Wos®
Scopus®
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Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-68249137264
Wos: WOS:000267516800021
Source Identifiers
ISSN: 0960-1317
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