Squeezed Film Damping Measurements on a Parallel-Plate Mems in the Free Molecule Regime

AuthID
P-003-HWP
4
Author(s)
Mol, L
·
Cretu, E
·
Wolffenbuttel, RF
Document Type
Article
Year published
2009
Published
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 19, Issue: 7, Pages: 074021 (6)
Conference
19Th Micromechanics Europe Workshop, Date: SEP 28-30, 2008, Location: Aachen, GERMANY, Host: RWTH Aachen Univ
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-68249137263
Wos: WOS:000267516800022
Source Identifiers
ISSN: 0960-1317
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