Ultra-Sensitive Shape Sensor Test Structures Based on Piezoresistive Doped Nanocrystalline Silicon

AuthID
 P-003-J6C
6
Author(s)
Marins, ES
·
Document Type
Article
Year published
2009
Published
in VACUUM, ISSN: 0042-207X
Volume: 83, Issue: 10, Pages: 1279-1282 (4)
Conference
5Th European Topical Conference on Hard Coating, Date: JUN 22-25, 2008, Location: Caparica, PORTUGAL
Indexing
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Publication Identifiers
SCOPUS: 2-s2.0-67349234535
Wos: WOS:000267505100018
Source Identifiers
ISSN: 0042-207X
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