Structural Changes in Zr-Si-N Films Vs. Their Silicon Content

AuthID
 P-000-BHX
4
Author(s)
Pierson, JF
·
Document Type
Article
Year published
2004
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 180, Pages: 352-356 (5)
Conference
Symposium on Protective Coatings and Thin Films Held at the E-Mrs 20Th Spring Meeting, Date: JUN 10-13, 2003, Location: Strasbourg, FRANCE, Sponsors: European Mat Res Soc
Indexing
Wos®
Scopus®
Crossref®50
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-1842715003
Wos: WOS:000220889900063
Source Identifiers
ISSN: 0257-8972
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