Hardness Evaluation of W-Si-N Sputtered Coatings After Thermal Degradation

AuthID
 P-000-BHZ
1
Author(s)
Document Type
Article
Year published
2004
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 180, Pages: 544-550 (7)
Conference
Symposium on Protective Coatings and Thin Films Held at the E-Mrs 20Th Spring Meeting, Date: JUN 10-13, 2003, Location: Strasbourg, FRANCE, Sponsors: European Mat Res Soc
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Publication Identifiers
SCOPUS: 2-s2.0-1842765444
Wos: WOS:000220889900098
Source Identifiers
ISSN: 0257-8972
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