Electrostatic Microresonators from Doped Hydrogenated Amorphous and Nanocrystalline Silicon Thin Films

AuthID
 P-000-153
3
Author(s)
·
Document Type
Article
Year published
2005
Published
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
Volume: 14, Issue: 5, Pages: 1082-1088 (7)
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Publication Identifiers
SCOPUS: 2-s2.0-27644446599
Wos: WOS:000232571000022
Source Identifiers
ISSN: 1057-7157
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