Publications

AuthID
P-014-YXP

Author(s)

CHRISTENSEN, DH

HICKERNELL, RK

SCHAAFSMA, DT

PELLEGRINO, JG

MCCOLLUM, MJ

HILL, JR

Editor(s)

Glembocki,OJ

Document Type

Proceedings Paper

Year published

1994

Published

in SPECTROSCOPIC CHARACTERIZATION TECHNIQUES FOR SEMICONDUCTOR TECHNOLOGY V, ISSN: 0277-786X

Volume: 2141, Pages: 177-188 (12)

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Wos^®

Crossref^®

Google Scholar^®

Publication Identifiers

DOI: 10.1117/12.176851

Wos: WOS:A1994BA61C00018

Source Identifiers

ISSN: 0277-786X

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