Surface and Interface Roughness of Ultrathin Nitric Oxide Oxynitride Gate Dielectric

AuthID
P-014-YY5
5
Author(s)
Hegde, RI
·
Maiti, B
·
Reid, KG
·
Tobin, PJ
Document Type
Letter
Year published
1998
Published
in JOURNAL OF THE ELECTROCHEMICAL SOCIETY, ISSN: 0013-4651
Volume: 145, Issue: 1, Pages: L13-L15 (3)
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Publication Identifiers
Wos: WOS:000071382900005
Source Identifiers
ISSN: 0013-4651
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