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Physical and Electrical Properties of Metal Gate Electrodes on Hfo
2
Gate Dielectrics
AuthID
P-014-YYJ
20
Author(s)
Schaeffer, JK
·
Samavedam, SB
·
Gilmer, DC
·
Dhandapani, V
·
Tobin, PJ
·
Mogab, J
·
Nguyen, BY
·
White, BE
·
Dakshina Murthy, S
·
Rai, RS
·
Jiang, ZX
·
Martin, R
·
Raymond, MV
·
Zavala, M
·
La, LB
·
Smith, JA
·
Garcia, R
·
Roan, D
·
Kottke, M
·
Gregory, RB
Document Type
Article
Year published
2003
Published
in
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
ISSN: 1071-1023
Volume: 21, Issue: 1, Pages: 11-17 (7)
Indexing
Wos
®
Crossref
®
88
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®
Metadata
Sources
Publication Identifiers
DOI
:
10.1116/1.1529650
Wos
: WOS:000182603900003
Source Identifiers
ISSN
: 1071-1023
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