Compatibility of Silicon Gates with Hafnium-Based Gate Dielectrics

AuthID
 P-014-YYM
19
Author(s)
Gilmer, DC
·
Hegde, R
·
Cotton, R
·
Smith, J
·
Dip, L
·
Garcia, R
·
Dhandapani, V
·
Triyoso, D
·
Roan, D
·
Franke, A
·
Prabhu, L
·
Hobbs, C
·
Grant, JM
·
La, L
·
Samavedam, S
·
Taylor, B
·
Tseng, H
·
Tobin, P
Document Type
Proceedings Paper
Year published
2003
Published
in MICROELECTRONIC ENGINEERING, ISSN: 0167-9317
Volume: 69, Issue: 2-4, Pages: 138-144 (7)
Indexing
Wos®
Crossref®22
Google Scholar®
Publication Identifiers
Wos: WOS:000185725300005
Source Identifiers
ISSN: 0167-9317
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