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Compatibility of Silicon Gates with Hafnium-Based Gate Dielectrics

AuthID
P-014-YYM

Author(s)

Gilmer, DC

Hegde, R

Cotton, R

Smith, J

Dip, L

Garcia, R

Dhandapani, V

Triyoso, D

Roan, D

Franke, A

Rai, R

Prabhu, L

Hobbs, C

Grant, JM

La, L

Samavedam, S

Taylor, B

Tseng, H

Tobin, P

Document Type

Proceedings Paper

Year published

2003

Published

in MICROELECTRONIC ENGINEERING, ISSN: 0167-9317

Volume: 69, Issue: 2-4, Pages: 138-144 (7)

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Publication Identifiers

DOI: 10.1016/s0167-9317(03)00290-9

Wos: WOS:000185725300005

Source Identifiers

ISSN: 0167-9317

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Compatibility of Silicon Gates with Hafnium-Based Gate Dielectrics

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