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Microstructure Modified Hfo2 Using Zr Addition with TaXCY Gate for Improved Device Performance and Reliability
AuthID
P-014-YYS
P-014-YYS
30
Author(s)
Hegde, RI
·Triyoso, DH
·Tobin, PJ
·Kalpat, S
·Ramon, ME
·Tseng, HH
·Schaeffer, JK
·Luckowski, E
·Taylor, WJ
·Capasso, CC
·[+10]·
Zollner, S
·Gregory, R
·Werho, D
·Fonseca, L
·Stoker, M
·Tracy, C
·Chan, BW
·Chiu, YH
·White, BE
Document Type
Proceedings Paper
Year published
2005
Published
in IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2005, TECHNICAL DIGEST
Pages: 39-42 (4)
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Publication Identifiers
Wos: WOS:000236225100007
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| Name Order | Name | Name Order | Name | Name Order | Name | ||
|---|---|---|---|---|---|---|---|
| 1 | Hegde, RI; | 2 | Triyoso, DH; | 3 | Tobin, PJ; | ||
| 4 | Kalpat, S; | 5 | Ramon, ME; | 6 | Tseng, HH; | ||
| 7 | Schaeffer, JK; | 8 | Luckowski, E; | 9 | Taylor, WJ; | ||
| 10 | Capasso, CC; | 11 | Gilmer, DC; | 12 | Moosa, M; | ||
| 13 | Haggag, A; | 14 | Raymond, M; | 15 | Roan, D; | ||
| 16 | Nguyen, J; | 17 | La, LB; | 18 | Hebert, E; | ||
| 19 | Cotton, R; | 20 | Wang, XD; | 21 | Zollner, S; | ||
| 22 | Gregory, R; | 23 | Werho, D; | 24 | Rai, RS; | ||
| 25 | Fonseca, L; | 26 | Stoker, M; | 27 | Tracy, C; | ||
| 28 | Chan, BW; | 29 | Chiu, YH; | 30 | White, BE; |
