Simultaneous and Independent Determination of the Refractive Index and the Thickness of Thin Films by Ellipsometry*

AuthID
P-014-Z13
4
Author(s)
Vedam, K
·
Lukes, F
·
Srinivasan, R
Document Type
Article
Year published
1968
Published
in Journal of the Optical Society of America, ISSN: 0030-3941
Volume: 58, Issue: 4, Pages: 526
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ISSN: 0030-3941
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