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Effect of Substrate Bias Voltage on Amorphous Si-C-N Films Produced by Pvd Techniques
AuthID
P-000-BXQ
5
Author(s)
Cunha, L
·
Moura, C
·
Leme, J
·
Andres, G
·
Pischow, K
1
Editor(s)
Matthews A.Marchev K.Patscheider J.Pauleau Y.
Document Type
Article
Year published
2004
Published
in
THIN SOLID FILMS,
ISSN: 0040-6090
Volume: 447, Pages: 436-442 (7)
Conference
30Th International Conference on Metallurgical Coatings and Thin Films,
Date:
APR 28-MAY 02, 2003,
Location:
SAN DIEGO, CA
Indexing
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®
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Metadata
Sources
Publication Identifiers
DOI
:
10.1016/s0040-6090(03)01121-0
SCOPUS
: 2-s2.0-1342347469
Wos
: WOS:000188995700078
Source Identifiers
ISSN
: 0040-6090
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