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Amorphous Silicon Electrostatic Microresonators with High Quality Factors
AuthID
P-000-BY1
3
Author(s)
Gaspar, J
·
Chu, V
·
Conde, JP
Document Type
Article
Year published
2004
Published
in
APPLIED PHYSICS LETTERS,
ISSN: 0003-6951
Volume: 84, Issue: 4, Pages: 622-624 (3)
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Publication Identifiers
DOI
:
10.1063/1.1644319
SCOPUS
: 2-s2.0-1242285003
Wos
: WOS:000188316500056
Source Identifiers
ISSN
: 0003-6951
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