Preparation Of Tungsten Nitride Films On Gallium-Arsenide And Study Of Their Thermostability

AuthID
 P-015-BY6
4
Author(s)
GALANIN, SG
·
KUZNETSOV, GD
·
CHERNYAK, EY
Document Type
Article
Year published
1993
Published
in PISMA V ZHURNAL TEKHNICHESKOI FIZIKI, ISSN: 0320-0116
Volume: 19, Issue: 2, Pages: 47-50 (4)
Indexing
Wos®
Publication Identifiers
Wos: WOS:A1993KT54400010
Source Identifiers
ISSN: 0320-0116
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