Energy Distributions of Ga+ and In+ Secondary Ions Sputtered from AIiiBV Compound Semiconductors by Noble Gas Ions:: Mass-Dependence of the High-Energy Yield on the Second Component (P, As, Sb) of the Compounds

AuthID
 P-015-BYB
6
Author(s)
Daolio, S
·
Pagura, C
·
Greenwood, CL
·
Karpuzov, DS
·
McIntyre, NS
Document Type
Proceedings Paper
Year published
2003
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 203, Pages: 198-204 (7)
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Publication Identifiers
Wos: WOS:000182624600032
Source Identifiers
ISSN: 0168-583X
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