Detailed Phisyco-Chemical Characterization of the Multilayered Thin Films Based on Titanium Oxynitride and Copper Doped Titanium Nitride Obtained by Different Pvd Techniques

AuthID
 P-015-DZM
7
Author(s)
Jokanović, V
·
Petrović, B
·
Ferarra, M
·
Jokanović, B
·
Živković, S
·
Nasov, I
Document Type
Article
Year published
2022
Published
in Vacuum, ISSN: 0042-207X
Volume: 195, Pages: 110708
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Source Identifiers
ISSN: 0042-207X
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