Self-Organized Nanopatterning of Silicon Surfaces by Ion Beam Sputtering

AuthID
P-015-GY1
7
Author(s)
Muñoz-García J.
·
Vázquez L.
·
Castro M.
·
Gago R.
·
Moreno-Barrado A.
·
Cuerno R.
Document Type
Review
Year published
2014
Published
in Materials Science and Engineering R: Reports, ISSN: 0927796X
Volume: 86, Pages: 1-44 (43)
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Publication Identifiers
SCOPUS: 2-s2.0-84909633488
Source Identifiers
ISSN: 0927796X
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