Dc Magnetron Sputtered Tungsten: W Film Properties and Electrical Properties of W/Si Schottky Diodes

AuthID
P-016-5H4
3
Author(s)
Mamor, M
·
Meyer, F
Document Type
Article
Year published
2005
Published
in Applied Physics A, ISSN: 0947-8396
Volume: 81, Issue: 1, Pages: 209-215
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ISSN: 0947-8396
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