Publications

AuthID
P-016-98A

Author(s)

Campo, EM

Caballero, D

Fernandez, E

Errachid, A

Esteve, J

Plaza, JA

Document Type

Article

Year published

2009

Published

in Journal of Micromechanics and Microengineering, ISSN: 0960-1317

Volume: 19, Issue: 10, Pages: 105013

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Google Scholar^®

Publication Identifiers

DOI: 10.1088/0960-1317/19/10/105013

Source Identifiers

ISSN: 0960-1317

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