Focused Ion Beam-Assisted Technology in Sub-Picolitre Micro-Dispenser Fabrication

AuthID
P-016-98H
7
Author(s)
Caballero, D
·
Campo, EM
·
Perez-Castillejos, R
·
Errachid, A
·
Esteve, J
·
Plaza, JA
Document Type
Article
Year published
2008
Published
in Journal of Micromechanics and Microengineering, ISSN: 0960-1317
Volume: 18, Issue: 7, Pages: 075021
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ISSN: 0960-1317
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