Development of Resistors with Taxny Deposited by Rf Sputtering Using Lithography Technique

AuthID
 P-016-BZT
6
Author(s)
César, RR
·
Mederos, M
·
Joanni, E
·
Teixeira, RC
·
Diniz, JA
Document Type
Proceedings Paper
Year published
2023
Published
in 2023 37th Symposium on Microelectronics Technology and Devices (SBMicro)
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