Silicon Nitride Thin-Films by Rf Sputtering : Application on Solid State Lithium Batteries

AuthID
 P-016-KHX
6
Author(s)
Sousa, R.
·
Ribeiro, J. F.
·
Sousa, J. A.
·
Montenegro, R. T.
·
Correia, J. H.
Document Type
Proceedings Paper
Year published
2013
Published
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