Influence of Oxygen/Argon Pressure Ratio on the Morphology, Optical and Electrical Properties of Ito Thin Films Deposited at Room Temperature

AuthID
P-003-X2T
Document Type
Article
Year published
2008
Published
in VACUUM, ISSN: 0042-207X
Volume: 82, Issue: 12, Pages: 1507-1511 (5)
Conference
5Th Iberian Vacuum Meeting, Date: SEP 18-21, 2005, Location: Guimaraes, PORTUGAL, Host: Univ Minho
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-49249130712
Wos: WOS:000259460300040
Source Identifiers
ISSN: 0042-207X
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