Piezoelectric Aluminum Nitride Thin Films for Cmos Compatible Mems: Sputter Deposition and Doping

AuthID
 P-017-4M6
6
Author(s)
Sandeep, S
·
Rudresh, J
·
Gund, V
·
Nagaraja, KK
·
Vinayakumar, KB
Document Type
Review
Year published
2024
Published
in CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, ISSN: 1040-8436
Indexing
Wos®
Scopus®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-85205663804
Wos: WOS:001326653700001
Source Identifiers
ISSN: 1040-8436
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