Role of Rf Power on the Properties of Undoped Snox Films Deposited by Rf-Perte at Low Substrate Temperature

AuthID
 P-003-ZDV
6
Author(s)
Parreira, P
·
Document Type
Article
Year published
2008
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 202, Issue: 16, Pages: 3893-3896 (4)
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Publication Identifiers
SCOPUS: 2-s2.0-41849092605
Wos: WOS:000255821600017
Source Identifiers
ISSN: 0257-8972
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