Fabrication and Electrical Characterization of Low-Temperature Polysilicon Films for Sensor Applications

AuthID
 P-017-TFP
10
Author(s)
Mota, FC
·
Garcia, IS
·
Retolaza, A
·
Santos, DE
·
Aguiam, DE
·
Dias, RA
·
Calaza, C
·
Silva, AF
·
Alves, FS
Document Type
Article
Year published
2024
Published
in Micromachines
Volume: 16, Issue: 1, Pages: 57
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