Combined In-Depth X-Ray Photoelectron Spectroscopy and Time-Of-Flight Secondary Ion Mass Spectroscopy Study of the Effect of Deposition Pressure and Substrate Bias on the Electrical Properties and Composition of Ga-Doped Zno Thin Films Grown by Magnetron Sputtering

AuthID
P-017-W3H
7
Author(s)
Filipe C. Correia
·
Paulo B. Salvador
·
Alexander Welle
·
Michael Bruns
·
Adélio Mendes
·
Carlos J. Tavares
Document Type
Article
Year published
2018
Published
in , ISSN: 0040-6090
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ISSN: 0040-6090
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