Low Temperature High K Dielectric on Poly-Si Tfts

AuthID
 P-003-ZSJ
4
Author(s)
Document Type
Article
Year published
2008
Published
in JOURNAL OF NON-CRYSTALLINE SOLIDS, ISSN: 0022-3093
Volume: 354, Issue: 19-25, Pages: 2534-2537 (4)
Conference
22Nd International Conference on Amorphous and Nanocrystalline Semiconductors, Date: AUG 19-24, 2007, Location: Breckenridge, CO, Sponsors: Univ Toledo, PVIC, NREL, United Solar, Forschungszentrum Julich, Hewlett Packard, OptiSolar, PARC, Sanyo, Sharp
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Wos: WOS:000256500400102
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ISSN: 0022-3093
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